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Laser micromachining of porous anodic alumina film
Jha, Himendra
Kikuchi, Tatsuya
Sakairi, Masatoshi
Takahashi, Hideaki
Location: http://hdl.handle.net/2115/28634
Applied Physics A: Materials Science & Processing. 88(4), 2007, 617-622
http://dx.doi.org/10.1007/s00339-007-4140-4

A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 ?m were fabricated on anodic alumina film with good precision and reproducibility.

Belongs to: Hokkaido University Collection of Scholarly and Academic Papers

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Laser micromachining of porous anodic alumina film
Id. 28157808
Idioma inglés
Titulo Laser micromachining of porous anodic alumina film
Autor(es) Jha, Himendra
Kikuchi, Tatsuya
Sakairi, Masatoshi
Takahashi, Hideaki
Location http://hdl.handle.net/2115/28634
Applied Physics A: Materials Science & Processing. 88(4), 2007, 617-622
http://dx.doi.org/10.1007/s00339-007-4140-4
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Descripción A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 ?m were fabricated on anodic alumina film with good precision and reproducibility.
Palabras clave 572
Tipo de recurso article (author version)
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Estructura Atomic
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The original publication is available at www.springerlink.com
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Fecha de contribución 25-oct-2007
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