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Detalles del recurso

Descripción

No abstract available.

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Autor(es)

Patil, Samadhan B. -  Vaidya, Sangeeta -  Kumbhar, Alk -  Dusane, R.O. -  Chandorkar, A.N. -  Ramgopal Rao, V. - 

Id.: 70840420

Versión: 1.0

Estado: Final

Tipo de recurso: Conference Proceedings  -  PeerReviewed  - 

Tipo de Interactividad: Expositivo

Nivel de Interactividad: muy bajo

Audiencia: Estudiante  -  Profesor  -  Autor  - 

Estructura: Atomic

Coste: no

Copyright: sí

Requerimientos técnicos:  Browser: Any - 

Relación: [References] http://eprints.gla.ac.uk/154910/

Fecha de contribución: 23-ene-2018

Contacto:

Localización:
* Patil, S. B. , Vaidya, S., Kumbhar, A., Dusane, R.O., Chandorkar, A.N. and Ramgopal Rao, V. (2000) Low Temperature Hot-Wire CVD Nitrides for Deep Sub-Micron CMOS Technologies. In: Tenth International Workshop on the Physics of Semiconductor Devices, Delhi, India, 14-18 Dec 1999, pp. 879-882. ISBN 9780819436016

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