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This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

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CaltechTHESIS  

Autor(es)

Gray, Moshe - 

Id.: 71078756

Versión: 1.0

Estado: Final

Tipo:  application/pdf - 

Tipo de recurso: Thesis  -  NonPeerReviewed  - 

Tipo de Interactividad: Expositivo

Nivel de Interactividad: muy bajo

Audiencia: Estudiante  -  Profesor  -  Autor  - 

Estructura: Atomic

Coste: no

Copyright: sí

Formatos:  application/pdf - 

Requerimientos técnicos:  Browser: Any - 

Relación: [References] http://resolver.caltech.edu/CaltechTHESIS:03122018-162127158
[References] https://thesis.library.caltech.edu/10770/

Fecha de contribución: 13-mar-2018

Contacto:

Localización:
* Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. Master's thesis, California Institute of Technology. http://resolver.caltech.edu/CaltechTHESIS:03122018-162127158

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  1. The Design and Implementation of a Reticle Maker for VLSI This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI ...

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