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Digital.CSIC (162.855 recursos)

Repositorio institucional del Consejo Superior de Investigaciones Científicas. Digital.CSIC es un depósito de documentos digitales, cuyo objetivo es organizar, archivar, preservar y difundir en modo de acceso abierto la producción intelectual resultante de la actividad investigadora del CSIC.

(IMB-CNM) Artículos post-print

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  1. Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings

    Rueda, Daniel R.; Martín-Fabiani, Ignacio; Soccio, Michelina; Alayo, N.; Pérez Murano, Francesc; Rebollar, Esther; García-Gutiérrez, Mari Cruz; Castillejo, Marta; Ezquerra, Tiberio A.
    Grazing-incidence small-angle X-ray scattering (GISAXS) has been used to structurally characterize model hard and soft gratings of nanotechnological interest. The different gratings exhibit GISAXS patterns with characteristic features that can be associated with their level of order along the direction of periodicity and the length of the lines. Highly ordered gratings, made out of silicon by electron beam lithography, and those nanofabricated on spin-coated polymer films by nanoimprint lithography, exhibit characteristic semicircle-like GISAXS patterns with intensity spots periodically distributed on a semicircle whose radius is related to the incidence angle used. These gratings can be considered as one-dimensional crystalline lattices...
    - 13-dic-2017

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